Geological Literature Search (GEOLIS) (Geological Survey of Japan / AIST)

Evaluation of the Cleanliness of Ultrapure Water by the Analysis for Metal Concentration Depositted on Si Wafer Surface Using Vapor Phase Decomposition/Inductively Coupled Plasma Mass Spectrometry

Authors=KATO Toshimasa, HOSHI Shigeyuki, NOGUCHI Toshihiko, CHUUMAN Takaaki

Journal/Book_names=Bunseki Kagaku

volume=59

number=7

pages=559-563

Publish_year=2010

Publish_Country=JPN

Publisher=Japan Society for Analytical Chemistry

Language_of_Text=JA

Language_of_Abs=EN

ISSN=05251931

DOI=10.2116/bunsekikagaku.59.559

ID=201021768

@id=https://gbank.gsj.jp/ld/resource/geolis/201021768