Microcrystalline Diamond Deposition Using substrates (a-SiC/Si) Treated by Diamond-Paste polishing

Authors=ABE Toshimi, KUDO Keita, NUKUHI Genta, HANDA Hiroyuki, OHBA Katsuhiko, SUEMITSU Maki, SATO Noriyoshi

Journal/Book_names=Memoirs of the Tohoku Institute of Technology, Ser.1: Science and Engineering

number=27

pages=11-15

Publish_year=2007

Publish_Country=JPN

Publisher=Tohoku Institute of Technology

Language_of_Text=JA

Language_of_Abs=EN

ISSN=2853817

ID=200722648