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Microcrystalline Diamond Deposition Using substrates (a-SiC/Si) Treated by Diamond-Paste polishing
ABE Toshimi, KUDO Keita, NUKUHI Genta, HANDA Hiroyuki, OHBA Katsuhiko, SUEMITSU Maki, SATO Noriyoshi
itemdescription
TitleMicrocrystalline Diamond Deposition Using substrates (a-SiC/Si) Treated by Diamond-Paste polishing
AuthorsABE Toshimi, KUDO Keita, NUKUHI Genta, HANDA Hiroyuki, OHBA Katsuhiko, SUEMITSU Maki, SATO Noriyoshi
Data nameMemoirs of the Tohoku Institute of Technology, Ser.1: Science and Engineering
Num27
Page11-15
Year2007
PublisherTohoku Institute of Technology
LanguageJA
Abstract languageEN
ISSN2853817
GEOLIS URLhttps://darc.gsj.jp/archives/detail?cls=geolis&pkey=200722648
@idhttps://gbank.gsj.jp/ld/resource/geolis/200722648