Geological Literature Search (GEOLIS) (Geological Survey of Japan / AIST)

Preparation of HfO2 nano-films by atomic layer deposition using HfCl4 and O2 under atmospheric pressure

Authors=NONOBE Shinichi, TAKAHASHI Naoyuki, NAKAMURA Takato

Journal/Book_names=Solid State Sciences

volume=6

number=11

pages=1217-1219

Publish_year=2004

Publish_Country=FRA

Publisher=Elsevier SAS

Language_of_Text=EN

Language_of_Abs=EN

ISSN=12932558

DOI=10.1016/j.solidstatesciences.2004.07.030

ID=200429363

@id=https://gbank.gsj.jp/ld/resource/geolis/200429363