Identification of Si and SiH in catalytic chemical vapor deposition SiH4 by laser induced fluorescence spectroscopy

Authors=NOZAKI Yoshitaka, KONGO Koichi, MIYAZAKI Toshihiko, KITAZOE Makiko, HORII Katsuhiko, UMEMOTO Hironobu, MASUDA Atsushi, MATSUMURA Hideki

Journal/Book_names=Journal of Applied Physics

volume=88

number=9

pages=5437-5443

Publish_year=2000

Publish_Country=USA

Publisher=American Institute of Physics

Language_of_Text=EN

Language_of_Abs=EN

ISSN=00218979

ID=200009373