Geological Literature
Identification of Si and SiH in catalytic chemical vapor deposition SiH4 by laser induced fluorescence spectroscopy
NOZAKI Yoshitaka, KONGO Koichi, MIYAZAKI Toshihiko, KITAZOE Makiko, HORII Katsuhiko, UMEMOTO Hironobu, MASUDA Atsushi, MATSUMURA Hideki
| item | description |
|---|---|
| Title | Identification of Si and SiH in catalytic chemical vapor deposition SiH4 by laser induced fluorescence spectroscopy |
| Authors | NOZAKI Yoshitaka, KONGO Koichi, MIYAZAKI Toshihiko, KITAZOE Makiko, HORII Katsuhiko, UMEMOTO Hironobu, MASUDA Atsushi, MATSUMURA Hideki |
| Data name | Journal of Applied Physics |
| Volume | 88 |
| Num | 9 |
| Page | 5437-5443 |
| Year | 2000 |
| Publisher | American Institute of Physics |
| Language | EN |
| Abstract language | EN |
| ISSN | 00218979 |
| GEOLIS URL | https://darc.gsj.jp/archives/detail?cls=geolis&pkey=200009373 |
| @id | https://gbank.gsj.jp/ld/resource/geolis/200009373 |