Diamond Deposition and Behavior of Atomic Carbon Species in a Low-Pressure Inductively Coupled Plasma

Authors=ITO Haruhiko, TEII Kungen, ISHIKAWA Masayuki, ITO Masafumi, HORI Masaru, TAKEO Takashi, KATO Terumasa, GOTO Toshio

Journal/Book_names=Research Reports of the Nagoya Municipal Industrial Research Institute

number=84

pages=39-39

Publish_year=1999

Publish_Country=JPN

Publisher=Nagoya Municipal Industrial Research Institute

Language_of_Text=JA

ISSN=03693333

ID=200000871