Geological Literature
Diamond Deposition and Behavior of Atomic Carbon Species in a Low-Pressure Inductively Coupled Plasma
ITO Haruhiko, TEII Kungen, ISHIKAWA Masayuki, ITO Masafumi, HORI Masaru, TAKEO Takashi, KATO Terumasa, GOTO Toshio
| item | description |
|---|---|
| Title | Diamond Deposition and Behavior of Atomic Carbon Species in a Low-Pressure Inductively Coupled Plasma |
| Authors | ITO Haruhiko, TEII Kungen, ISHIKAWA Masayuki, ITO Masafumi, HORI Masaru, TAKEO Takashi, KATO Terumasa, GOTO Toshio |
| Data name | Research Reports of the Nagoya Municipal Industrial Research Institute |
| Num | 84 |
| Page | 39-39 |
| Year | 1999 |
| Publisher | Nagoya Municipal Industrial Research Institute |
| Language | JA |
| ISSN | 03693333 |
| @id | https://gbank.gsj.jp/ld/resource/geolis/200000871 |