Geological Literature Search (Geological Survey of Japan / AIST)

FIB/HVEM observation of the configuration of cracks and the defect structure near the cracks in Si

Authors=SAKA H. ! ABE S.

Journal/Book_names=Journal of Electron Microscopy

Publish_Country=Japan

volume=46

number=1

pages=45-57

Publish_year=1997

Publisher=Japanese Society of Electron Microscopy

Language_of_Text=EN

Language_of_Abs.=EN

Data_Type=SE

ISSN=00220744

ID=199707020