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FIB/HVEM observation of the configuration of cracks and the defect structure near the cracks in Si
SAKA H., ABE S.
itemdescription
TitleFIB/HVEM observation of the configuration of cracks and the defect structure near the cracks in Si
AuthorsSAKA H., ABE S.
Data nameJournal of Electron Microscopy
Volume46
Num1
Page45-57
Year1997
PublisherJapanese Society of Electron Microscopy
LanguageEN
Abstract languageEN
ISSN00220744
GEOLIS URLhttps://darc.gsj.jp/archives/detail?cls=geolis&pkey=199707020
@idhttps://gbank.gsj.jp/ld/resource/geolis/199707020