Simulations and experiments of SiC heteroepitaxial growth on Si(001) surface

Authors=KITABATAKE Makoto, DEGUCHI Masahiro, HIRAO Takashi

Journal/Book_names=Journal of Applied Physics

volume=74

number=7

pages=4438-4445

Publish_year=1993

Publish_Country=USA

Publisher=American Institute of Physics

Language_of_Text=EN

Language_of_Abs=EN

ISSN=00218979

ID=199302940