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Simulations and experiments of SiC heteroepitaxial growth on Si(001) surface
KITABATAKE Makoto, DEGUCHI Masahiro, HIRAO Takashi
itemdescription
TitleSimulations and experiments of SiC heteroepitaxial growth on Si(001) surface
AuthorsKITABATAKE Makoto, DEGUCHI Masahiro, HIRAO Takashi
Data nameJournal of Applied Physics
Volume74
Num7
Page4438-4445
Year1993
PublisherAmerican Institute of Physics
LanguageEN
Abstract languageEN
ISSN00218979
GEOLIS URLhttps://darc.gsj.jp/archives/detail?cls=geolis&pkey=199302940
@idhttps://gbank.gsj.jp/ld/resource/geolis/199302940