Observation of contact holes by atomic force microscopy with a ZnO whisker tip

Authors=KADO Hiroyuki, YAMAMOTO Shin-ichi, YOKOYAMA Kazuo, TOHDA Takao, UMETANI Yukihiro

Journal/Book_names=Journal of Applied Physics

volume=74

number=7

pages=4354-4356

Publish_year=1993

Publish_Country=USA

Publisher=American Institute of Physics

Language_of_Text=EN

Language_of_Abs=EN

ISSN=00218979

ID=199302165