Geological Literature
Observation of contact holes by atomic force microscopy with a ZnO whisker tip
KADO Hiroyuki, YAMAMOTO Shin-ichi, YOKOYAMA Kazuo, TOHDA Takao, UMETANI Yukihiro
| item | description |
|---|---|
| Title | Observation of contact holes by atomic force microscopy with a ZnO whisker tip |
| Authors | KADO Hiroyuki, YAMAMOTO Shin-ichi, YOKOYAMA Kazuo, TOHDA Takao, UMETANI Yukihiro |
| Data name | Journal of Applied Physics |
| Volume | 74 |
| Num | 7 |
| Page | 4354-4356 |
| Year | 1993 |
| Publisher | American Institute of Physics |
| Language | EN |
| Abstract language | EN |
| ISSN | 00218979 |
| GEOLIS URL | https://darc.gsj.jp/archives/detail?cls=geolis&pkey=199302165 |
| @id | https://gbank.gsj.jp/ld/resource/geolis/199302165 |