Geological Literature Search (GEOLIS) (Geological Survey of Japan / AIST)

Annealing behavior of MeV implanted carbon in silicon

Authors=ISOMAE Seiichi, ISHIBA Tsutomu

Journal/Book_names=Journal of Applied Physics

volume=74

number=6

pages=3815-3820

Publish_year=1993

Publish_Country=USA

Publisher=American Institute of Physics

Language_of_Text=EN

Language_of_Abs=EN

ISSN=218979

ID=199301987

@id=https://gbank.gsj.jp/ld/resource/geolis/199301987