Geological Literature
Annealing behavior of MeV implanted carbon in silicon
ISOMAE Seiichi, ISHIBA Tsutomu
item | description |
---|---|
Title | Annealing behavior of MeV implanted carbon in silicon |
Authors | ISOMAE Seiichi, ISHIBA Tsutomu |
Data name | Journal of Applied Physics |
Volume | 74 |
Num | 6 |
Page | 3815-3820 |
Year | 1993 |
Publisher | American Institute of Physics |
Language | EN |
Abstract language | EN |
ISSN | 218979 |
GEOLIS URL | https://darc.gsj.jp/archives/detail?cls=geolis&pkey=199301987 |
@id | https://gbank.gsj.jp/ld/resource/geolis/199301987 |