Geological Literature Search (GEOLIS) (Geological Survey of Japan / AIST)

Nucleation Control of Silicon on Silicon Oxide for Low-temperature CVD and Silicon Selective Epitaxy

Authors=KATO Manabu, SATO Taketoshi, MUROTA Junichi, MIKOSHIBA Nobuo

Journal/Book_names=Journal of Crystal Growth, Crystal Growth 1989, Part 1, Proceedings of the Ninth International Conference on Crystal Growth

volume=99

number=1-4

pages=240-244

Publish_year=1990

Publish_Country=NLD

Publisher=North-Holland

Language_of_Text=EN

Language_of_Abs=EN

ISSN=00220248

DOI=10.1016/0022-0248(90)90520-U

ID=199001942

@id=https://gbank.gsj.jp/ld/resource/geolis/199001942