Geological Literature
Nucleation Control of Silicon on Silicon Oxide for Low-temperature CVD and Silicon Selective Epitaxy
KATO Manabu, SATO Taketoshi, MUROTA Junichi, MIKOSHIBA Nobuo
| item | description |
|---|---|
| Title | Nucleation Control of Silicon on Silicon Oxide for Low-temperature CVD and Silicon Selective Epitaxy |
| Authors | KATO Manabu, SATO Taketoshi, MUROTA Junichi, MIKOSHIBA Nobuo |
| Data name | Journal of Crystal Growth, Crystal Growth 1989, Part 1, Proceedings of the Ninth International Conference on Crystal Growth |
| Volume | 99 |
| Num | 1-4 |
| Page | 240-244 |
| Year | 1990 |
| Publisher | North-Holland |
| Language | EN |
| Abstract language | EN |
| ISSN | 00220248 |
| DOI | 10.1016/0022-0248(90)90520-U |
| @id | https://gbank.gsj.jp/ld/resource/geolis/199001942 |