High Quality Ultra-Thin SiO2/Si Structure Formed by Use of Platinum Catalyst

Authors=KOBAYASHI H.

Journal/Book_names=Japanese Scientific Monthly

volume=53

number=12

pages=1302-1305

Publish_year=2000

Publish_Country=JPN

Publisher=Japan Society for the Promotion of Science

Language_of_Text=JA

ISSN=3872440

ID=200101424