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Technologies, applications, and reliabilities of Microelectromechanical Systems (MEMS) (131)(abs.)
TSUCHIYA Toshiyuki
itemdescription
TitleTechnologies, applications, and reliabilities of Microelectromechanical Systems (MEMS) (131)(abs.)
AuthorsTSUCHIYA Toshiyuki
Data nameProgram and Abstracts, SEGJ International Symposium - Imaging and Interpretation: Science and Technology for Substainable Development -
Volume9
Page22-22
Year2009
PublisherSociety of Exploration Geophysicists of Japan
LanguageEN
GEOLIS URLhttps://darc.gsj.jp/archives/detail?cls=geolis&pkey=201730614
@idhttps://gbank.gsj.jp/ld/resource/geolis/201730614