Geological Literature
Fabrication of amorphous silicate films with various chemical compositions by RF sputtering method with three kinds of targets (poster session)(abs.)
TAKAYAMA Akiko, TSUCHIYAMA Akira, YONEDA Akira
| item | description |
|---|---|
| Title | Fabrication of amorphous silicate films with various chemical compositions by RF sputtering method with three kinds of targets (poster session)(abs.) |
| Authors | TAKAYAMA Akiko, TSUCHIYAMA Akira, YONEDA Akira |
| Data name | Abstracts with Program, Annual Meeting of Japan Association of Mineralogical Sciences |
| Volume | 2016 |
| Page | 165-165 |
| Year | 2016 |
| Publisher | Japan Association of Mineralogical Sciences |
| Language | JA |
| ISSN | 13486543 |
| GEOLIS URL | https://darc.gsj.jp/archives/detail?cls=geolis&pkey=201651601 |
| DOI | 10.14824/jakoka.2016.0_160 |
| @id | https://gbank.gsj.jp/ld/resource/geolis/201651601 |