Geological Literature
Evaluation of an Open-air Silicon Capacitive Micro Accelerometer
ASO Hideaki, NISHIZAWA Mitsutomo, NIITSUMA Hiroaki
| item | description |
|---|---|
| Title | Evaluation of an Open-air Silicon Capacitive Micro Accelerometer |
| Authors | ASO Hideaki, NISHIZAWA Mitsutomo, NIITSUMA Hiroaki |
| Data name | Proceedings of the SEGJ Conference |
| Volume | 106 |
| Page | 101-104 |
| Year | 2002 |
| Publisher | The Society of Exploration Geophysicists of Japan |
| Language | JA |
| Abstract language | EN |
| @id | https://gbank.gsj.jp/ld/resource/geolis/200205442 |