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Layer-by-layer Oxidation of Si Surfaces
WATANABE Heiji, MIYATA Noriyuki, ICHIKAWA Masakazu
itemdescription
TitleLayer-by-layer Oxidation of Si Surfaces
AuthorsWATANABE Heiji, MIYATA Noriyuki, ICHIKAWA Masakazu
Data nameButsuri
Volume55
Num11
Page846-853
Year2000
PublisherPhysical Society of Japan
LanguageJA
Abstract languageJA
ISSN00290181
GEOLIS URLhttps://darc.gsj.jp/archives/detail?cls=geolis&pkey=200009357
@idhttps://gbank.gsj.jp/ld/resource/geolis/200009357