Geological Literature
Characteristics of Silicon Capacitive Accelerometer Developed by Micromachining Technique
NISHIZAWA Mitsutomo, LIM Geunbae, NIITSUMA Hiroaki, ESASHI Masayoshi
| item | description |
|---|---|
| Title | Characteristics of Silicon Capacitive Accelerometer Developed by Micromachining Technique |
| Authors | NISHIZAWA Mitsutomo, LIM Geunbae, NIITSUMA Hiroaki, ESASHI Masayoshi |
| Data name | Proceedings of the SEGJ Conference |
| Volume | 98 |
| Page | 101-105 |
| Year | 1998 |
| Publisher | The Society of Exploration Geophysicists of Japan |
| Language | JA |
| Abstract language | EN |
| @id | https://gbank.gsj.jp/ld/resource/geolis/199806813 |