Geological Literature
Preparation of rho-type silicon films by plasma decomposition of a SiH4/H2/BF3 gas mixture
KAKINUMA H., MOHRI M., TSURUOKA T.
| item | description |
|---|---|
| Title | Preparation of rho-type silicon films by plasma decomposition of a SiH4/H2/BF3 gas mixture |
| Authors | KAKINUMA H., MOHRI M., TSURUOKA T. |
| Data name | Journal of Applied Physics |
| Volume | 74 |
| Num | 7 |
| Page | 4614-4619 |
| Year | 1993 |
| Publisher | American Institute of Physics |
| Language | EN |
| Abstract language | EN |
| ISSN | 00218979 |
| GEOLIS URL | https://darc.gsj.jp/archives/detail?cls=geolis&pkey=199302255 |
| @id | https://gbank.gsj.jp/ld/resource/geolis/199302255 |