Geological Literature
B doping effect on gas source Si-MBE growth: a comparison of B2H6 gas doping and HBO2 Knudsen cell doping
HIRAYAMA Hiroyuki, HIROI Masayuki, KOYAMA Kazuhisa, TATSUMI Toru
| item | description |
|---|---|
| Title | B doping effect on gas source Si-MBE growth: a comparison of B2H6 gas doping and HBO2 Knudsen cell doping |
| Authors | HIRAYAMA Hiroyuki, HIROI Masayuki, KOYAMA Kazuhisa, TATSUMI Toru |
| Data name | Journal of Crystal Growth, Molecular Beam Epitaxy 1990, Proceedings of the Sixth International Conference on Molecular Beam Epitaxy |
| Volume | 111 |
| Num | 1-4 |
| Page | 856-859 |
| Year | 1991 |
| Publisher | North-Holland |
| Language | EN |
| Abstract language | EN |
| ISSN | 00220248 |
| GEOLIS URL | https://darc.gsj.jp/archives/detail?cls=geolis&pkey=199101230 |
| DOI | 10.1016/0022-0248(91)91096-S |
| @id | https://gbank.gsj.jp/ld/resource/geolis/199101230 |