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In-situ selective-area epitaxy of GaAs using a GaAs oxide layer as a mask
HIRATANI Y., OHKI Y., AKITA K.
itemdescription
TitleIn-situ selective-area epitaxy of GaAs using a GaAs oxide layer as a mask
AuthorsHIRATANI Y., OHKI Y., AKITA K.
Data nameJournal of Crystal Growth, Molecular Beam Epitaxy 1990, Proceedings of the Sixth International Conference on Molecular Beam Epitaxy
Volume111
Num1-4
Page570-573
Year1991
PublisherNorth-Holland
LanguageEN
Abstract languageEN
ISSN00220248
DOI10.1016/0022-0248(91)91041-8
@idhttps://gbank.gsj.jp/ld/resource/geolis/199101229