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Redistribution of delta-doped Sb in Si
FUKATSU S.J., KUBO S., SHIRAKI Y., ITO R.
itemdescription
TitleRedistribution of delta-doped Sb in Si
AuthorsFUKATSU S.J., KUBO S., SHIRAKI Y., ITO R.
Data nameJournal of Crystal Growth, Molecular Beam Epitaxy 1990, Proceedings of the Sixth International Conference on Molecular Beam Epitaxy
Volume111
Num1-4
Page843-846
Year1991
PublisherNorth-Holland
LanguageEN
Abstract languageEN
ISSN00220248
DOI10.1016/0022-0248(91)91094-Q
@idhttps://gbank.gsj.jp/ld/resource/geolis/199100657