Geological Literature
Limitations of selective epitaxial growth conditions in gas-source MBE using Si2H6
AKETAGAWA Ken-ichi, TATSUMI Toru, SAKAI Junro
| item | description |
|---|---|
| Title | Limitations of selective epitaxial growth conditions in gas-source MBE using Si2H6 |
| Authors | AKETAGAWA Ken-ichi, TATSUMI Toru, SAKAI Junro |
| Data name | Journal of Crystal Growth, Molecular Beam Epitaxy 1990, Proceedings of the Sixth International Conference on Molecular Beam Epitaxy |
| Volume | 111 |
| Num | 1-4 |
| Page | 860-863 |
| Year | 1991 |
| Publisher | North-Holland |
| Language | EN |
| Abstract language | EN |
| ISSN | 00220248 |
| DOI | 10.1016/0022-0248(91)91097-T |
| @id | https://gbank.gsj.jp/ld/resource/geolis/199100085 |