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The Characterization of the (111) Facet Faces on the Seed Cone of (100) Silicon Single Crystals Grown by MCZ and CZ Methods by X-ray CTR Scattering
HARADA J., SHIMURA T., TAKATA M., YAKUSHIJI K., HOSHI K.
itemdescription
TitleThe Characterization of the (111) Facet Faces on the Seed Cone of (100) Silicon Single Crystals Grown by MCZ and CZ Methods by X-ray CTR Scattering
AuthorsHARADA J., SHIMURA T., TAKATA M., YAKUSHIJI K., HOSHI K.
Data nameJournal of Crystal Growth
Volume104
Num4
Page773-779
Year1990
PublisherNorth-Holland
LanguageEN
Abstract languageEN
ISSN00220248
GEOLIS URLhttps://darc.gsj.jp/archives/detail?cls=geolis&pkey=199000757
DOI10.1016/0022-0248(90)90101-P
@idhttps://gbank.gsj.jp/ld/resource/geolis/199000757