Geological Literature
Si Substrate Preparation for GaAs/Si by Metalorganic Chemical Vapor Deposition
FUJITA K., SHIBA Y., YAMAMOTO T.
| item | description |
|---|---|
| Title | Si Substrate Preparation for GaAs/Si by Metalorganic Chemical Vapor Deposition |
| Authors | FUJITA K., SHIBA Y., YAMAMOTO T. |
| Data name | Journal of Crystal Growth, Crystal Growth 1989, Part 1, Proceedings of the Ninth International Conference on Crystal Growth |
| Volume | 99 |
| Num | 1-4 |
| Page | 341-453 |
| Year | 1990 |
| Publisher | North-Holland |
| Language | EN |
| Abstract language | EN |
| ISSN | 00220248 |
| DOI | 10.1016/0022-0248(90)90540-2 |
| @id | https://gbank.gsj.jp/ld/resource/geolis/199000499 |