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Si Substrate Preparation for GaAs/Si by Metalorganic Chemical Vapor Deposition
FUJITA K., SHIBA Y., YAMAMOTO T.
itemdescription
TitleSi Substrate Preparation for GaAs/Si by Metalorganic Chemical Vapor Deposition
AuthorsFUJITA K., SHIBA Y., YAMAMOTO T.
Data nameJournal of Crystal Growth, Crystal Growth 1989, Part 1, Proceedings of the Ninth International Conference on Crystal Growth
Volume99
Num1-4
Page341-453
Year1990
PublisherNorth-Holland
LanguageEN
Abstract languageEN
ISSN00220248
GEOLIS URLhttps://darc.gsj.jp/archives/detail?cls=geolis&pkey=199000499
DOI10.1016/0022-0248(90)90540-2
@idhttps://gbank.gsj.jp/ld/resource/geolis/199000499