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Lattice Defect in Selective Epitaxial Silicon and Laterally Overgrown Regions on SiO2
KITAJIMA Hiroshi, FUJIMOTO Yuki
itemdescription
TitleLattice Defect in Selective Epitaxial Silicon and Laterally Overgrown Regions on SiO2
AuthorsKITAJIMA Hiroshi, FUJIMOTO Yuki
Data nameJournal of Crystal Growth
Volume98
Num3
Page264-276
Year1989
PublisherNorth-Holland
LanguageEN
Abstract languageEN
ISSN00220248
GEOLIS URLhttps://darc.gsj.jp/archives/detail?cls=geolis&pkey=198902442
DOI10.1016/0022-0248(89)90141-3
@idhttps://gbank.gsj.jp/ld/resource/geolis/198902442