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Experimental Investigation of Sputtering Mechanism
YAMAGUCHI Tasaburo, WATANABE Yasuyoshi
itemdescription
TitleExperimental Investigation of Sputtering Mechanism
AuthorsYAMAGUCHI Tasaburo, WATANABE Yasuyoshi
Data nameJournal of Crystal Growth
Volume48
Num1
Page1-8
Year1980
PublisherNorth-Holland Publishing Company
LanguageEN
Abstract languageEN
ISSN00220248
GEOLIS URLhttps://darc.gsj.jp/archives/detail?cls=geolis&pkey=198004121
DOI10.1016/0022-0248(80)90185-2
@idhttps://gbank.gsj.jp/ld/resource/geolis/198004121