Geological Literature Search (GEOLIS) (Geological Survey of Japan / AIST)

Fabrication of amorphous silicate films with various chemical compositions by RF sputtering method with three kinds of targets (poster session)(abs.)

Authors=TAKAYAMA Akiko, TSUCHIYAMA Akira, YONEDA Akira

Journal/Book_names=Abstracts with Program, Annual Meeting of Japan Association of Mineralogical Sciences

volume=2016

pages=165-165

Publish_year=2016

Publisher=Japan Association of Mineralogical Sciences

Language_of_Text=JA

ISSN=13486543

DOI=10.14824/jakoka.2016.0_160

ID=201651601

@id=https://gbank.gsj.jp/ld/resource/geolis/201651601