Geological Literature Search (GEOLIS) (Geological Survey of Japan / AIST)

Evaluation of an Open-air Silicon Capacitive Micro Accelerometer

Authors=ASO Hideaki, NISHIZAWA Mitsutomo, NIITSUMA Hiroaki

Journal/Book_names=Proceedings of the SEGJ Conference

volume=106

pages=101-104

Publish_year=2002

Publish_Country=JPN

Publisher=The Society of Exploration Geophysicists of Japan

Language_of_Text=JA

Language_of_Abs=EN

ID=200205442

@id=https://gbank.gsj.jp/ld/resource/geolis/200205442