Characteristics of Silicon Capacitive Accelerometer Developed by Micromachining Technique

Authors=NISHIZAWA Mitsutomo, LIM Geunbae, NIITSUMA Hiroaki, ESASHI Masayoshi

Journal/Book_names=Proceedings of the SEGJ Conference

volume=98

pages=101-105

Publish_year=1998

Publish_Country=JPN

Publisher=The Society of Exploration Geophysicists of Japan

Language_of_Text=JA

Language_of_Abs=EN

ID=199806813