Geological Literature Search (GEOLIS) (Geological Survey of Japan / AIST)

B doping effect on gas source Si-MBE growth: a comparison of B2H6 gas doping and HBO2 Knudsen cell doping

Authors=HIRAYAMA Hiroyuki, HIROI Masayuki, KOYAMA Kazuhisa, TATSUMI Toru

Journal/Book_names=Journal of Crystal Growth, Molecular Beam Epitaxy 1990, Proceedings of the Sixth International Conference on Molecular Beam Epitaxy

volume=111

number=1-4

pages=856-859

Publish_year=1991

Publish_Country=NLD

Publisher=North-Holland

Language_of_Text=EN

Language_of_Abs=EN

ISSN=00220248

DOI=10.1016/0022-0248(91)91096-S

ID=199101230

@id=https://gbank.gsj.jp/ld/resource/geolis/199101230