Geological Literature Search (GEOLIS) (Geological Survey of Japan / AIST)

Limitations of selective epitaxial growth conditions in gas-source MBE using Si2H6

Authors=AKETAGAWA Ken-ichi, TATSUMI Toru, SAKAI Junro

Journal/Book_names=Journal of Crystal Growth, Molecular Beam Epitaxy 1990, Proceedings of the Sixth International Conference on Molecular Beam Epitaxy

volume=111

number=1-4

pages=860-863

Publish_year=1991

Publish_Country=NLD

Publisher=North-Holland

Language_of_Text=EN

Language_of_Abs=EN

ISSN=00220248

DOI=10.1016/0022-0248(91)91097-T

ID=199100085

@id=https://gbank.gsj.jp/ld/resource/geolis/199100085